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Wavelength-multiplexed Multi-mode EUV Reflection Ptychography based on Automatic-Differentiation
Ptychographic extreme ultraviolet (EUV) diffractive imaging has emerged as a promising candidate for the next-generation metrology solutions in the semiconductor industry, as it can image wafer samples in reflection geometry at the nanoscale.
Noise-robust latent vector reconstruction in ptychography using deep generative models
In this paper, we harness this dimensionality reduction capability of autoencoders to search for the object solution within the latent space rather than the object space.
Maximum-likelihood estimation in ptychography in the presence of Poisson-Gaussian noise statistics
Optical measurements often exhibit mixed Poisson-Gaussian noise statistics, which hampers image quality, particularly under low signal-to-noise ratio (SNR) conditions.
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