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Nonsmooth-Optimization-Based Bandwidth Optimal Control for Precision Motion Systems
Precision motion systems are at the core of various manufacturing equipment.
Transcending the Acceleration-Bandwidth Trade-off: Lightweight Precision Stages with Active Control of Flexible Dynamics
In recent years, the drastically growing demand for higher throughput and reduced power consumption in various IC manufacturing equipment calls for the development of next-generation precision positioning systems with unprecedented acceleration capability while maintaining exceptional positioning accuracy and high control bandwidth.
FleXstage: Lightweight Magnetically Levitated Precision Stage with Over-Actuation towards High-Throughput IC Manufacturing
For these systems, the motion control bandwidth is limited by the first structural resonance frequency of the stage, which enforces a fundamental trade-off between the stage's bandwidth and acceleration capability.
A Multimodal Learning Framework for Comprehensive 3D Mineral Prospectivity Modeling with Jointly Learned Structure-Fluid Relationships
This study presents a novel multimodal fusion model for three-dimensional mineral prospectivity mapping (3D MPM), effectively integrating structural and fluid information through a deep network architecture.
Sequential Structure and Control Co-design of Lightweight Precision Stages with Active control of flexible modes
To overcome this challenge, this paper proposes a new hardware design and control framework for lightweight precision motion stages with the stage's low-frequency flexible modes actively controlled.
Control Co-design of Actively Controlled Lightweight Structures for High-acceleration Precision Motion Systems
Precision motion stages are an essential part of a wide range of manufacturing equipment, and their motion performance are critical to the quality and throughput of the systems.
