no code implementations • 28 Jul 2023 • Enrique Dehaerne, Bappaditya Dey, Hossein Esfandiar, Lander Verstraete, Hyo Seon Suh, Sandip Halder, Stefan De Gendt
In this work, we propose a method for obtaining coherent and complete labels for a dataset of hexagonal contact hole DSA patterns while requiring minimal quality control effort from a DSA expert.