Diagnosis of electron density and temperature by using collisional radiative model in capacitively coupled Ar plasmas II: two-dimensional distributions

no code implementations • 21 Oct 2020 • Jidun Wu, Hao Zheng, Yanfei Wang, Fengzhu Zhou, Xiaojiang Huang

Effects of radio-frequency power and driven frequency on the two-dimensional (axial and radial) distributions of electron density and temperature were experimentally investigated in low pressure capacitively coupled argon plasmas.

Plasma Physics